Photonic crystal cavities in silicon dioxide

نویسندگان

  • Yiyang Gong
  • Jelena Vučković
چکیده

One dimensional nanobeam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over 104 are found via simulation, while quality factors of over 5 103 are found in experiment, for cavities with mode volumes of 2.0 /n 3 and in the visible wavelength range 600–716 nm. The dependences of the cavity quality factor and mode volume for different design parameters are also considered. © 2010 American Institute of Physics. doi:10.1063/1.3297877

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تاریخ انتشار 2009